 技術摘要： |
A tilting angle measuring device includes an optical device, a four-quadrant optical detector and a computing unit. By the optical device, a light beam emitted by the coherent light source is processed into a reference beam and a test beam. The four-quadrant optical detector has four photoelectric converting units arranged in an array for respectively receiving the reference and test beams. The computing unit is electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the test beam.
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| 解決的問題或達成的功效： |
The present invention relates to a measuring device, and more particularly to a measuring device for simultaneously measuring the linear displacement and the tilting angle of an object.
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| 應用領域： |
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| 適用產品： |
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| IPC： |
G01B11/14
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| Claim 1： |
1. A tilting angle measuring device for use between a reference surface, an object and a coherent light source, the tilting angle measuring device comprising:
an optical device for receiving a light beam emitted by the coherent light source, and splitting the light beam into a first sub-beam and a second sub-beam, directing the first sub-beam to the reference surface such that a third sub-beam is reflected by the reference surface, directing the second sub-beam to the object such that a fourth sub-beam is reflected by the object, and processing the third and fourth sub-beams into a fifth sub-beam and a sixth sub-beam, respectively;
a four-quadrant optical detector having four photoelectric converting units arranged in an array for respectively receiving the fifth and sixth sub-beams outputted by the optical device; and
a computing unit electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the sixth sub-beam.
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