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線性位移與傾角同時量測之干涉儀LINEAR DISPLACEMENT AND TILTING ANGLE MEASURING DEVICE
專利名稱 線性位移與傾角同時量測之干涉儀
LINEAR DISPLACEMENT AND TILTING ANGLE MEASURING DEVICE
申請日 (校編號) 2008/10/01  (097050US)
專利證書號 7,869,056 美國
專利權人 國立中央大學
發明人 梁肇文


技術摘要:
A tilting angle measuring device includes an optical device, a four-quadrant optical detector and a computing unit. By the optical device, a light beam emitted by the coherent light source is processed into a reference beam and a test beam. The four-quadrant optical detector has four photoelectric converting units arranged in an array for respectively receiving the reference and test beams. The computing unit is electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the test beam.

解決的問題或達成的功效:
The present invention relates to a measuring device, and more particularly to a measuring device for simultaneously measuring the linear displacement and the tilting angle of an object.

應用領域:


適用產品:


IPC:
G01B11/14

Claim 1:
1. A tilting angle measuring device for use between a reference surface, an object and a coherent light source, the tilting angle measuring device comprising:
an optical device for receiving a light beam emitted by the coherent light source, and splitting the light beam into a first sub-beam and a second sub-beam, directing the first sub-beam to the reference surface such that a third sub-beam is reflected by the reference surface, directing the second sub-beam to the object such that a fourth sub-beam is reflected by the object, and processing the third and fourth sub-beams into a fifth sub-beam and a sixth sub-beam, respectively;
a four-quadrant optical detector having four photoelectric converting units arranged in an array for respectively receiving the fifth and sixth sub-beams outputted by the optical device; and
a computing unit electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the sixth sub-beam.

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聯繫方式
聯絡人:研發處智權技轉組 與我連絡
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