專利名稱 | 利用標準CMOS製程之深層井另給偏壓八邊型矽光檢測器 SI PHOTODIODE WITH SYMMETRY LAYOUT AND DEEP WELL BIAS IN CMOS TECHNOLOGY |
申請日 (校編號) | 2011/03/02 (099062US) |
專利證書號 | 8,598,639 美國 |
專利權人 | 國立中央大學 |
發明人 | 辛裕明、周芳嬪、王靖雯、陳冠宇 |
技術摘要: | ||||||||
一種利用CMOS製程之深層井另給偏壓對稱型矽光檢測器,其包括一基板、一深層井以及一PN二極體結構。深層井配置於基板上,其中一偏壓給於深層井。深層井以內之區域形成矽光檢測器之主體結構。PN二極體結構配置於深層井以內之區域,其中矽光檢測器具有對稱性的圍繞式結構。矽光檢測器使用深層井製程步驟,並利用另給偏壓的方式來消除基板吸收光後造成的影響和干擾,進而大幅改善反應速度及頻寬。另外,矽光檢測器具有對稱性的圍繞式結構,以達到電場分布均勻的目的,亦可有效改善光檢測器基板雜訊的干擾。 |
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解決的問題或達成的功效: | ||||||||
The invention relates to a photodiode and more particularly to a silicon photodiode with symmetry layout and deep well bias in CMOS technology. |
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應用領域: | ||||||||
光檢測器 |
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適用產品: | ||||||||
光檢測器 |
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IPC: | ||||||||
H01L-031/102(2006.01) |
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Claim 1: | ||||||||
1. A silicon photodiode with a symmetry layout and a deep well bias in a CMOS technology, comprising: a substrate; a deep well disposed on the substrate, wherein a bias is provided to the deep well and a region surrounded by the deep well forms a main body of the silicon photodiode; and a PN diode structure disposed in the region surrounded by the deep well, wherein the silicon photodiode has a symmetrical surrounding structure. |
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